q=thermoelectrical+effect+in+sic+for+high%5C-temperature+mems+sensors&searchType=standard&isFacet=true&view=standard&rows=10&sortWay=score&sortOrder=desc&searchWay0=marc&logical0=AND
rows=10&searchWay0=marc&logical0=AND
Thermoelectrical effect in SIC for high-temperature MEMS sensors